APPARATUS FOR PATTERNING COATINGS

摘要

An apparatus for patterning coatings is provided to enhance productivity of electronic devices, simplify processes, reduce a manufacturing cost, and be capable of a uniform coating by forming fine patterns with high accuracy within a short time. A flat plate is formed to be transferred in a Z-axis direction, an X-axis direction, a Y-axis direction, and a Theta-axis direction on the basis of a plate of a flat plate transfer unit. A substrate(14) is arranged at a lower side of the flat plate and includes a groove to be filled with coatings(17a). A filling amount control unit controls the amount of coatings in order to fill only the groove. The filling amount control unit transfers the flat plate to the substrate having the groove to be filled with the coating. The flat plate and the substrate are attached to each other in order to transfer the coatings to the substrate. The coatings are printed on a target in order to form patterns.