| 发明名称 |
Fluid flow measuring and proportional fluid flow control device |
| 摘要 |
The present invention provides restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration.
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| 申请公布号 |
US7292945(B2) |
申请公布日期 |
2007.11.06 |
| 申请号 |
US20050521697 |
申请日期 |
2005.06.14 |
| 申请人 |
ENTEGRIS, INC. |
发明人 |
WARGO CHRISTOPHER;NIERMEYER J. KARL;SHYU JIEH-HWA;BRODEUR CRAIG L.;BASSER WILLIAM |
| 分类号 |
G01P5/14;G06F19/00;G01F1/44;G05D7/06 |
主分类号 |
G01P5/14 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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