发明名称 Method of fabricating an array of multi-electroded piezoelectric transducers for piezoelectric diaphragm structures
摘要 A circuit provides energy to a plurality of piezoelectric diaphragm structures formed in a two-dimensional array. Each piezoelectric diaphragm structure includes a piezoelectric element in operational contact with at least a first side electrode and a second side electrode. A switching system includes a first connection for a first power source, for application of power to the first side electrode and a second connection for a second power source, for application of power to the second side electrode. In a first state, power appropriate for performing a poling operation of the piezoelectric material is available for application to the first electrode, and the second electrode, and in a second state, power appropriate to activate the piezoelectric material to cause operational movement of the poled piezoelectric diaphragm structure is available for application to the first electrode and the second electrode.
申请公布号 US7290336(B2) 申请公布日期 2007.11.06
申请号 US20050104887 申请日期 2005.04.13
申请人 PALO ALTO RESEARCH CENTER INCORPORATED 发明人 BUHLER STEVEN A.;FITCH JOHN S.;LEAN MENG H.;LITTAU KARL A.
分类号 B21D53/76;B41J2/045;B41J2/14;B41J2/16;G01D15/00;H01L41/09;H01L41/24 主分类号 B21D53/76
代理机构 代理人
主权项
地址