发明名称 PIEZOELECTRIC RESONATOR AND METHOD FOR MANUFACTURING THEREOF
摘要 A piezoelectric oscillator and a manufacturing method thereof are provided to reduce the size by excluding a penetration area on a substrate by electrically connecting a first excitation electrode and a third electrode at the lateral side instead of a through-hole. A piezoelectric oscillator includes an oscillator substrate(3); a base substrate for supporting the oscillator substrate; a lead substrate for covering the surface of the oscillator substrate facing the base substrate; a first excitation electrode(31) formed on the surface of the oscillator substrate facing the lead substrate; a second excitation electrode(32) formed on the surface of the oscillator substrate facing the base substrate; and a third electrode(36) formed on the surface of the oscillator substrate facing the base substrate and electrically connected with the first excitation electrode by recessed parts(35) formed on the side of the oscillator substrate.
申请公布号 KR20070106933(A) 申请公布日期 2007.11.06
申请号 KR20070042055 申请日期 2007.04.30
申请人 EPSON TOYOCOM KABUSHIKI KAISHA 发明人 TSUCHIDO KENJI
分类号 H03H9/19;H01L41/09;H01L41/18;H01L41/22;H01L41/23;H01L41/29;H01L41/313;H01L41/332;H01L41/338;H03H3/02 主分类号 H03H9/19
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