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发明名称
HIGH-RESOLUTION PATTERNING
摘要
申请公布号
KR100773014(B1)
申请公布日期
2007.11.05
申请号
KR20057020990
申请日期
2005.11.04
申请人
发明人
分类号
H05B33/10;C30B1/00;H01L21/02;H01L51/00;H01L51/05;H01L51/40;H01L51/56
主分类号
H05B33/10
代理机构
代理人
主权项
地址
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