METHOD OF FORMING POLYMER PATTERN AND METAL FILM PATTERN, METAL PATTERN, MICROSHUTTER, MICROLENS ARRAY STAMPER, PLASTIC MOLD USING THEREOF

摘要

A method of forming a polymer pattern and a method of forming a metal film, a metal pattern, a microshutter, a microlens array stamper, and a plastic mold using the same are provided to change a shape of a vertical cross section of the polymer pattern by altering the light exposure irradiated on a polymer layer. An opaque mask pattern(410) is formed on one surface of a transparent substrate(400). A photosensitive polymer layer(420) is formed on the surface of the substrate with the opaque mask pattern. The substrate is irradiated by the light generated by a diffuser(430) which scatters incident light, thereby exposing the photosensitive polymer layer. A filler layer having refractive index higher than air is formed between the other surface of the substrate and the diffuser.