PIEZOELECTRIC ACTUATOR, METHOD FOR PRODUCING SAME, LIQUID DROPLET JETTING APPARATUS, AND METHOD FOR PRODUCING SAME

摘要

PROBLEM TO BE SOLVED: To prevent damage as much as possible by reducing stress concentration caused in a portion, even if the portion whose thickness rapidly changes occurs in a thin film layer formed by a film forming process by AD method.

SOLUTION: A film-forming nozzle 52 is moved, so that an edge of areas with a piezoelectric material layer 31 formed therein by the film-forming nozzle 52 moving relative to a vibration plate 30, is positioned outside deformable portions 30a of a vibration plate 30 and overlaps with restricted portions 30b, when seeing from the direction orthogonal to the vibration plate 30. This reduces stress concentration on a portion of the piezoelectric layer 31 corresponding to a boundary portion of the deposition areas. Therefore, the damage of the piezoelectric material layer 31 is prevented.

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