| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a means of improving detection accuracy in acceleration by preventing the influence of thermal stress on temperature detecting elements, in a thermal detecting type acceleration sensor comprising a heater for heating sealed air and the temperature detecting elements at the opposed positions holding the heater between the opposed elements, for detecting the temperature of the air on a sensor substrate with surrounding air sealed by the cover member. <P>SOLUTION: The thermal detecting type acceleration sensor 1 comprises the heater 4 for heating the air 15 sealed in the sensor substrate 3 where the surrounding air 15 is sealed by covering with the cover member; and a pair of the temperature elements 6 for respectively detecting the temperature of the air 15 sealed at the opposed positions holding the heater 4 between the elements, which detects the magnitude of the acceleration applied to the sealed air 15 based on the difference in temperature in a pair of the elements 6. In each of the temperature detecting elements 6, a part of the element is fixed to the sensor substrate 3 under thermally deformable conditions. <P>COPYRIGHT: (C)2008,JPO&INPIT |
