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摘要
申请公布号
JP2007531299(A)
申请公布日期
2007.11.01
申请号
JP20070506069
申请日期
2005.01.18
申请人
发明人
分类号
H01L21/8247;H01L21/28;H01L27/115;H01L29/423;H01L29/788;H01L29/792
主分类号
H01L21/8247
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