| 摘要 |
A double arm substrate transport unit for transporting a work piece, such as a semiconductor wafer, is provided of which the robotic arm is formed of a first forearm supported by the tip part of a base arm so as to be freely rotatable, a first end effector that is supported by the tip part of the first forearm so as to be freely rotatable and on which a work piece is placed, a second forearm that is supported by the tip part of the base arm so as to be freely rotatable and that is attached above the first forearm so as to overlap the first forearm and a second end effector that is supported by the tip part of the second forearm so as to be freely rotatable and on which a work piece is placed. Thereby, the U-shaped bar that is required by a conventional unit becomes unnecessary and the number of components is reduced so that the unit is made compact and so that a reduction in weight is achieved in comparison with a conventional unit that has two base arms, one on the right and the other on the left and, in addition, the mechanical rigidity is maintained at a high level while the transport distance is made great. |
