| 摘要 |
PROBLEM TO BE SOLVED: To achieve a reduction of deficit pixels and a longer service lifetime of an organic EL display device by improving a cleaning degree to organic contamination of a substrate used for the organic EL display device. SOLUTION: Before performing vapor deposition in a second chamber different from a first chamber for performing vapor deposition, ozone cleaning is executed while heating a substrate of an organic display device. Then, after performing vapor deposition of an organic substance in the first chamber or performing vapor deposition in the second chamber different from the first chamber for performing vapor deposition, the ozone cleaning is executed while heating the substrate of the organic display device. COPYRIGHT: (C)2008,JPO&INPIT
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