发明名称 |
CARBON NANOTUBE-SOLDER COMPOSITE STRUCTURES FOR INTERCONNECTS, PROCESS OF MAKING SAME, PACKAGES CONTAINING SAME, AND SYSTEMS CONTAINING SAME |
摘要 |
A carbon nanotube (CNT) array is patterned on a substrate. The substrate can be a microelectronic die, an interposer-type structure for a flip-chip, a mounting substrate, or a board. The CNT array is patterned by using a patterned metallic seed layer on the substrate to form the CNT array by chemical vapor deposition. The patterned CNT array can also be patterned by using a patterned mask on the substrate to form the CNT array by growing. A computing system that uses the CNT array for heat transfer from the die is also used. |
申请公布号 |
WO2007123778(A1) |
申请公布日期 |
2007.11.01 |
申请号 |
WO2007US08037 |
申请日期 |
2007.03.31 |
申请人 |
INTEL CORPORATION;RARAVIKAR, NACHIKET;SUH, DAEWOONG |
发明人 |
RARAVIKAR, NACHIKET;SUH, DAEWOONG |
分类号 |
H01L23/485;C01B31/02;H01L21/60 |
主分类号 |
H01L23/485 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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