发明名称 RADIATION-SENSITIVE INSULATING RESIN COMPOSITION
摘要 <p>Disclosed is a radiation-sensitive insulating resin composition which enables to obtain a cured product excellent in electrical insulation, resolution, adhesion and thermal shock resistance in a balanced manner. Specifically disclosed is a radiation-sensitive insulating resin composition which is characterized by containing a compound (A) having a disulfide structure, a resin (B) and a radiation-sensitive compound (D). It is preferable that the radiation-sensitive insulating resin composition further contains, if necessary, a compound (C) having a functional group reactive with an alkali-soluble resin (B1) and a crosslinked fine particles (E) having an average particle diameter of 30-500 nm.</p>
申请公布号 WO2007122929(A1) 申请公布日期 2007.11.01
申请号 WO2007JP55397 申请日期 2007.03.16
申请人 OKUDA, RYUICHI;JSR CORPORATION;ITO, ATSUSHI;SASAKI, HIROFUMI;GOTO, HIROFUMI 发明人 ITO, ATSUSHI;OKUDA, RYUICHI;SASAKI, HIROFUMI;GOTO, HIROFUMI
分类号 C08K5/22;C08L101/12;C08K5/36;G03F7/004;H01L21/312 主分类号 C08K5/22
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