| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a voltage vibration type yaw rate sensor capable of performing highly-accurate yaw rate detection even when being used in the atmosphere, by suppressing an influence on a detection signal caused by the charge in a vibrator, and its driving method. <P>SOLUTION: The first driving electrode 2 and the second driving electrode 3 are provided as driving electrodes for vibrating the vibrator 1, and mutually symmetrical driving signals Vd1, Vd2 are applied to the driving electrodes. Then, information of the vibrator charge is taken out from an output signal OUT from a charge amplifier 8, and the amplitude of either of the driving signals Vd1, Vd2 is adjusted thereby. Hereby, each charge quantity in the first driving electrode 2 and in the second driving electrode 3 is allowed to agree excellently with each other, to thereby suppress generation of the vibrator charge. Consequently, even if the vibrator 1 is driven by a great driving force, the detection signal is not influenced by the vibrator charge. <P>COPYRIGHT: (C)2008,JPO&INPIT |
