发明名称 |
CCD with improved charge transfer |
摘要 |
A method of forming a charge-coupled device including the steps of forming well or substrate of a first conductivity type; a buried channel of a second conductivity type; a plurality of first gate electrodes; partially coating the first gate electrodes with a mask substantially aligned to an edge of the first gate electrodes; implanting ions of the first conductivity type of sufficient energy to penetrate the first gates and into the buried channel; and a plurality of second gate electrodes covering regions each over the buried channel between the first gate electrodes.
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申请公布号 |
US2007254413(A1) |
申请公布日期 |
2007.11.01 |
申请号 |
US20060412034 |
申请日期 |
2006.04.26 |
申请人 |
EASTMAN KODAK COMPANY |
发明人 |
PARKS CHRISTOPHER;MCCARTEN JOHN P.;SUMMA JOSEPH R. |
分类号 |
H01L21/339;H01L21/338;H01L27/148;H04N5/335 |
主分类号 |
H01L21/339 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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