METHOD OF REMOVING CONDUCTIVE METAL OXIDE THIN-FILM AND APPARATUS THEREFOR

摘要

Opposed to conductive metal oxide thin-film (12) lying on a surface of base material (11), positive electrode (13) and first negative electrode (14) are disposed in parallel in a noncontact state. Between the positive electrode (13) and the first negative electrode (14), there are disposed multiple second negative electrodes (17) arranged in a contact state in the direction of width of conductive metal oxide thin-film (12). While electrolytic solution (15) lies in the interspaces of conductive metal oxide thin-film (12) and electrodes (13), (14) and (17), relative displacement of the base material (11) is carried out so that the conductive metal oxide thin-film (12) first passes the negative electrodes (14) and (17) and thereafter passes the positive electrode (13). As a result, the conductive metal oxide thin-film (12) is removed by reduction reaction.