| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus having a shortened cycle time. SOLUTION: In the substrate processing apparatus for applying each processing to a substrate 4 while conveying the substrate 4, a processing liquid supplying apparatus 1 and a drying apparatus 3 are sequentially arranged at least in the conveying direction of the substrate 4. The drying apparatus 3 consists of an air knife 20 for drying the processing liquid to the substrate 4, a plurality of nozzles (11a-11d) for supplying the processing liquid on the substrate 4 are provided on the processing liquid supplying apparatus 1, and at least the nozzle 11d in the final stage among these nozzles is directed in a direction opposite to the conveying direction of the substrate 4. COPYRIGHT: (C)2008,JPO&INPIT
|
