| 摘要 |
PROBLEM TO BE SOLVED: To suppress increase in the back pressure of a high vacuum pump and to suppress halting in the high vacuum pump in a containment state of the high vacuum pump upon evacuating by a roughing pump and a high vacuum pump. SOLUTION: A liquid crystal injecting device 1 to inject a liquid crystal into a liquid crystal cell in a vacuum chamber 2 is equipped with a vacuum evacuating unit 10 to evacuate inside the vacuum chamber 2 and a valve control unit 5 to control evacuation by the vacuum evacuating unit. The vacuum evacuating unit 10 has a roughing pump 4 and a high vacuum pump 3 to evacuate inside the vacuum chamber, wherein one end of a rough evacuation valve 13 the other end of which is connected to the vacuum chamber 2 and a gas discharge valve 12 of the high vacuum pump 3 are connected to the suction side of the roughing pump 4. In a containment state by closing the suction valve 11 and the gas discharge valve 12 of the high vacuum pump 3, the containment state is temporarily canceled by opening the gas discharge valve 12 each time when predetermined conditions are satisfied, so that an increase in the back pressure of the high vacuum pump 3 is suppressed and halting in the high vacuum pump 3 due to aggravation of the back pressure is suppressed. COPYRIGHT: (C)2008,JPO&INPIT
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