Semiconductor Sealing Resin Sheet and Semiconductor Device Manufacturing Method Using the Same

摘要

A semiconductor sealing resin sheet is composed of a supporting sheet and a sealing resin layer releasably laminated on the supporting sheet, wherein the sealing resin layer has a thermosetting property, the elastic modulus of the sealing resin layer before thermosetting is 1.0x10³ to 1.0x10⁴ Pa, the melt viscosity 120° C. of the sealing resin layer before thermosetting is 100 to 200 Pa.s, and the time required for the melt viscosity to reach its minimum value is 60 sec or less when the sealing resin layer before thermosetting is kept at a constant temperature of 120° C. A method for manufacturing semiconductor devices includes the steps of preparing a circuit substrate with a semiconductor chip mounted thereon, the circuit substrate is heated, the surface of the sealing resin layer in the semiconductor sealing resin sheet described above is embedded in concavo-convex parts and gaps on the semiconductor-chip-mounted surface of the circuit substrate, and the surface of the sealing resin layer is brought into contact with the surface of the circuit substrate and then the sealing resin layer is thermally cured.