发明名称 |
METHOD AND APPARATUS FOR IMAGING UTILIZING AN ULTRASONIC IMAGING SENSOR ARRAY |
摘要 |
The subject invention pertains to a piezoelectric device structure for improved acoustic wave sensing and/or generation, and process for making same. The piezoelectric thin film field effect transducer can be a thin film transistor (TFT) with either a piezoelectric film gate or a composite gate having a dielectric film and a piezoelectric film. The TFT structure can be either a top gate device or a bottom gate device. In an embodiment, the piezoelectric device structure can be used to form an array of piezoelectric thin film field effect transducers. A TFT switch can drive each piezoelectric transducer in the array. The piezoelectric transducers can both generate and sense acoustic waves. In a sensing mode, a signal from an acoustic wave can be collected at a readout terminal of the piezoelectric transducer. In a generating mode, an excitation signal can be applied across the piezoelectric transducer while the switch is 'on'. |
申请公布号 |
WO2007095390(A3) |
申请公布日期 |
2007.11.01 |
申请号 |
WO2007US04291 |
申请日期 |
2007.02.14 |
申请人 |
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.;SO, FRANKY;NINO, JUAN, CLAUDIO |
发明人 |
SO, FRANKY;NINO, JUAN, CLAUDIO |
分类号 |
H01L27/20;B06B1/06;H01L29/786 |
主分类号 |
H01L27/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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