| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve image quality by reducing image defects due to bubbles in adhesive layers and secure stable quality by lowering variations in the thickness of adhesive layers for every product. <P>SOLUTION: In a radiation imaging apparatus to be manufactured by this method, a scintillator for converting radiation to light is adhered by a transparent adhesive to a photoelectric conversion panel, a base. A photoelectric conversion element is formed in a photoelectric conversion element part, and the photoelectric conversion element part is adhered to the base. The method for manufacturing such radiation imaging apparatus includes a process for applying the transparent adhesive to the scintillator or the photoelectric conversion panel in an atmospheric-pressure atmosphere; a process for adhering the scintillator and the photoelectric conversion panel to each other in a pressure-reduced atmosphere; and a process for hardening the transparent adhesive after returning its atmosphere to an atmospheric-pressure atmosphere. <P>COPYRIGHT: (C)2008,JPO&INPIT |
