| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring instrument and a measurement method capable of efficient acquiring a measured values. <P>SOLUTION: This measuring instrument acquires image data as to a first graphic pattern and a second graphic pattern concerned in a single measuring object, and extracts respectively the feature portion of the first graphic pattern and the feature portion of the second graphic pattern from the image data. The feature portion of the first graphic pattern and the feature portion of the second graphic pattern are positioned each other, based on the positional relation in the measuring object. The prescribed measured value is acquired, based on the feature portion of the first graphic pattern and the feature portion of the second graphic pattern positioned therein. <P>COPYRIGHT: (C)2008,JPO&INPIT |
