METHOD FOR DESIGNING WIRING STRUCTURE OF LSI

摘要

PROBLEM TO BE SOLVED: To provide a method for designing the wiring structure of an LSI in which the wiring capacitance C and the wiring delay RC can be reduced. SOLUTION: In a wiring structure having the wiring length of 1 mm or longer, permittivity of an inter-wiring insulation layer in the widthwise direction of wiring is set higher than the permittivity of the inter-wiring insulation layer in the thickness direction of wiring. COPYRIGHT: (C)2008,JPO&INPIT