| 摘要 |
PROBLEM TO BE SOLVED: To easily form a protective membrane provided with both moisture absorbing property and dampproof property, by manufacturing the membrane from an oxidizable silicon nitride membrane which absorbs moisture and is easily oxidized and dampproof silicon nitride membrane which is dense with high dampproof property by CVD method; and to provide an organic electroluminescent element using the excellent thin type protective membrane without any change with lapse of time and to provide the manufacturing method for it. SOLUTION: The organic electroluminescence element is provided with at least a substrate, a first electrode provided on the substrate, an organic light emitting layer, a second electrode, the protective membrane, and a protective plate. The protective membrane in the organic electroluminescence element is composed from at least the dampproof silicon nitride membrane and the oxidizable silicon nitride membrane. COPYRIGHT: (C)2008,JPO&INPIT
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