| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal scanning type optical microscopic system capable of performing measurement without being influenced by a following condition, that is, when a level difference exists on the measurement object surface of a sample, when a part having different reflectance exists or when a transmission surface exists. SOLUTION: The confocal scanning type optical microscopic system sets divided areas that are areas obtained by dividing an area that is the measurement object range of the sample into plurality, and a divided area observation range that is an observation range set corresponding to the divided area in an optical axis direction in terms of the divided area, and acquires representative pixel data that is pixel data as a representative out of the respective pixel data of a two-dimensional image acquired within the divided area observation range by displacing the sample in the divided area observation range by a relative position displacing means. The above-mentioned problem is solved by constructing an observation image based on the representative pixel data. COPYRIGHT: (C)2008,JPO&INPIT
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