| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor with a disturbance compensating function having a piezoelectric element that matches the temperature difference of a temperature compensating piece and pressure sensor as much as possible and compensates the occurrence of a charge due to the vibration of the pressure sensor, namely acceleration motion of the piezoelectric element. SOLUTION: In the pressure sensor with the disturbance compensating function, a first piezoelectric element is arranged so that one side surface thereof comes into contact with fluid around a casing 4 of the pressure sensor, space 5 of the degree for always preventing the first piezoelectric element from coming into contact with the casing 4 when it deflects is disposed under the first piezoelectric element, a second piezoelectric element is arranged so that part thereof comes into contact with the fluid, space 6 of the same size as the space 5 disposed just under the first piezoelectric element is disposed under the second piezoelectric element, a third piezoelectric element is arranged inside the casing, the first piezoelectric element and second piezoelectric element are electrically interconnected in parallel so that the polarization direction is inverted, and the first piezoelectric element and third piezoelectric element are electrically interconnected in parallel so that the polarization direction is inverted. COPYRIGHT: (C)2008,JPO&INPIT
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