| 摘要 |
PROBLEM TO BE SOLVED: To provide a signal analysis device for obtaining a more accurate simulation result of the measuring signal of a substrate, and to provide a signal analysis method. SOLUTION: The signal analysis device comprises a signal difference calculation part 104 for calculating a difference between a signal measurement result and a signal analysis result; a signal analysis result correction part 105 for correcting to add the signal difference to an analysis result of a desired analysis point; an analysis extraction part 106; and a circuit analysis part 107. The signal analysis device enhances a product development efficiency, by adding the difference between the analysis result and the measurement result to the analysis result of the desired analysis point to correct the signal and accurately performing signal monitoring, in a development stage of a product, since the accuracy of the analysis result approximates signal waveform that is being generated on the actual product. COPYRIGHT: (C)2008,JPO&INPIT
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