| 摘要 |
PROBLEM TO BE SOLVED: To carry out analysis, under analytical conditions suitable for an analytical point with different compositions, and to automatically set suitable analytical conditions, even when an unknown compound exists, when analyzing the large number of analytical points containing the plurality of compositions by a wavelength dispersive X-ray spectroscopy (WDS). SOLUTION: The quantitative analysis is carried out in the every analytical point by an energy dispersive X-ray spectroscopy (EDS), having the feature of simple and short-time analysis, at step S71, and the compound is determined based on a result thereof at S72. The suitable analysis conditions are selected, based on the determination result thereof when the compound is a new compound, the analysis conditions are read from a database in an S76, when the compound is a compound registered already in the database, and the quantitative analysis is carried out by the WDS. COPYRIGHT: (C)2008,JPO&INPIT
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