| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin curing apparatus with a substrate introduction means which has a constitution capable of controlling the generation of damage of the substrate even if a small-sized substrate is transported. SOLUTION: The resin curing apparatus heats and cures a resin which is coated on a tape-like substrate 2 to be transported to the determined direction, wherein this apparatus has the substrate introduction means 41 for introducing both ends of the wide direction of the substrate 2 intersecting the transporting direction of the substrate 2, and a gas blowing-out means 42 for blowing out a gas towards the lower side of the substrate 2. COPYRIGHT: (C)2008,JPO&INPIT
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