摘要 |
An approach is provided for fabricating probe elements for probe card assemblies. Embodiments of the invention include using a reusable substrate, a reusable substrate with layered probe elements and a reusable substrate with a passive layer made of a material that does not adhere well to probe elements formed thereon. Examples of probe elements include, without limitation, a cantilever probe element, a vertically-oriented probe element, and portions of probe elements, e.g., a beam element of a cantilever probe element. Probe elements, or portions of probe elements, may be formed using any of a number of electroforming or plating processes such as, for example, plating using masking techniques, e.g., using lithographic techniques such as photolithography, stereolithography, X-ray lithography, etc. |
申请人 |
SV PROBE PTE LTD.;HEINEMANN, KEITH;LING, JAMIN;MCCULLOUGH, RICHARD;MCHUGH, BRIAN;WAHL, JORDAN |
发明人 |
HEINEMANN, KEITH;LING, JAMIN;MCCULLOUGH, RICHARD;MCHUGH, BRIAN;WAHL, JORDAN |