| 摘要 |
A wet-processing apparatus for processing substrates is provided. The wet-processing apparatus for processing substrates includes a conveyor type cleaning system and a spinner type wet-processing unit connected to the conveyor type cleaning system. In an embodiment of the present invention, the wet-processing apparatus further includes a cassette station for storing the substrates and a robot installed in the cassette station, wherein the substrate is delivered from the cassette station to the conveyor type cleaning system by the robot. The wet-processing apparatus mentioned above has excellent process uniformity, low consumption of the chemical, good cleaning ability, and low substrate broken frequency.
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