METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATING PIECE

摘要

Provided is a method for manufacturing a piezoelectric vibrating piece having less deteriorated layer on the surface and having vibrating characteristics with less difference compared with designed vibrating characteristics. Since a tuning fork type crystal vibrating piece (10) is separately formed by wet etching after removing a metal mask (30), a deteriorated layer (23) generated by dry etching is exposed, and the deteriorated layer (23) can be removed by wet etching. Thus, the method for manufacturing the tuning fork type crystal vibrating piece (10) having less difference compared with the designed vibrating characteristics is obtained.