发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p>A semiconductor device is provided to prevent an end of a semiconductor layer and a gate electrode from being short-circuited with each other by thickening an insulation layer for insulating an overlap region of the end of the semiconductor layer and the gate electrode as compared with an insulation layer covering the center of the semiconductor layer. A semiconductor layer(32) is formed on an insulated surface. A gate electrode(34) is formed on the semiconductor layer. An insulation layer is formed between the semiconductor layer and the gate electrode. The insulation layer includes a first region with a first thickness and a second region with a second thickness greater than the first thickness. The second region with the second thickness covers the end of the semiconductor layer overlapping the gate electrode. A third region of the semiconductor layer covered with the gate electrode has a third thickness, and the end of the semiconductor layer has a fourth thickness less than the third thickness.</p>
申请公布号 KR20070106436(A) 申请公布日期 2007.11.01
申请号 KR20070041136 申请日期 2007.04.27
申请人 SEMICONDUCTOR ENERGY LABORATORY K.K. 发明人 YAMAZAKI SHUNPEI;SUZUKI YUKIE;ARAI YASUYUKI;MORIYA YOSHITAKA;IKEDA KAZUKO;TANADA YOSHIFUMI;TAKAHASHI SYUHEI
分类号 H01L29/78;H01L21/336;H01L29/786 主分类号 H01L29/78
代理机构 代理人
主权项
地址