| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce a flaw detection error when the sensor is dirty regarding the thermal flow sensor. <P>SOLUTION: The measurement element 1 of the thermal flow sensor is arranged in the flow to be measured. The element 1 is composed of the first heating resistor 7 for detecting the flow rate, the second heating resistor 9 for heating the support 5 for the first heating resistor 7, and the current control circuits 101 and 102 for controlling the supply current so as the temperature of the second heating resistor 9 is higher than that of the first heating resistor 7. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
