| 摘要 |
PROBLEM TO BE SOLVED: To provide a signal delay structure by which an accurate and stable signal delay amount can be obtained and the integration degree can be improved by reducing the area of a capacitance part. SOLUTION: A delay circuit element 2 has the capacitance part 6 having a dielectric film 9 between an upper electrode 8 and a lower electrode 12 and a signal line 3 which is connected with either one of the upper electrode 8 and the lower electrode 12 through several contacts 13B and 13C. It is so constructed that the upper electrode 8 functions as a resistor part 5 between the several contacts 13B and 13C. COPYRIGHT: (C)2008,JPO&INPIT
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