| 摘要 |
PROBLEM TO BE SOLVED: To provide a microstructure used for a space light modulator or the like. SOLUTION: The method comprises forming a substrate with a first structure part having the first height and a second structure part having the height higher than the first height, and accumulating a sacrificial material such as polyarylenes and hydrogen silsesquioxane on the substrate. In this case, the sacrificial material covers at least the first structure part, the layer of the first structure material is accumulated on the first sacrificial material, and an opening part is formed in the layer of the first structure material. The opening part provides an access from outside to the first sacrificial material located under the layer of the first structure material. Further, a third structure part connecting with the second structure part is formed by eliminating the first sacrificial material, and at least a part of the third structure part exist above the first structure part. COPYRIGHT: (C)2008,JPO&INPIT
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