发明名称 PRESSURE REGULATION IN REMOTE ZONES
摘要 <p>A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosure. An estimated pressure within each zone is computed, as a function of the measured pressure in the enclosure and known characteristics of the conduit and the zone. For each zone, an inlet proportional valve and an outlet proportional valve of each enclosure is operated so as to control the input flow rate of the fluid into the respective enclosure and the output flow rate of the fluid out of the enclosure as a function of a pressure set point and the estimated pressure, thereby regulating pressure within the zone in accordance with the pressure set point.</p>
申请公布号 WO2007123576(A1) 申请公布日期 2007.11.01
申请号 WO2006US43692 申请日期 2006.11.08
申请人 MKS INSTRUMENTS, INC.;SHAJII, ALI;NAGARKATTI, SIDDHARTH, P.;HILL, GORDON 发明人 SHAJII, ALI;NAGARKATTI, SIDDHARTH, P.;HILL, GORDON
分类号 G05D7/06;F16K31/12;F16K31/36;G05D16/20;H01L21/321 主分类号 G05D7/06
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