| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the time for acquiring an exposure point data, in a method for acquiring the exposure point data, which is used for exposing an exposure pattern on a substrate from an exposing head based on the exposure point data, to be acquired from an original image data corresponding to deformation of the substrate. <P>SOLUTION: The original image data are divided into a plurality of image regions, and an image region having a coded data amount of a predetermined value or more in each image region is obtained as an object image region. A plurality of pieces of information of a virtual exposure point data locus on the original image data in the object image region are acquired corresponding to the information of a virtual drawing locus of the exposure head 30 on the substrate 12; trace data corresponding to the virtual exposure point data locus are acquired from the original image data and stored in a template memory section 56a; the information of the virtual exposure point data locus is specified corresponding to the information of an exposure locus on the substrate 12 in real exposure; and trace data corresponding to the information of the virtual exposure point data locus are acquired as exposure point data. <P>COPYRIGHT: (C)2008,JPO&INPIT |
