| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminated ceramic substrate which is high in chemical resistance and mechanical strength. <P>SOLUTION: The laminated ceramic substrate 100 is constituted of an internal ceramic layer 1 including four ceramic layers 1a and surface ceramic layers 2 which are each formed on the upper face and the lower face of the internal ceramic layer 1. Each ceramic layer 1a constituting the internal ceramic layer 1 contains alumina and diopside-based crystallized glass or anorthite-based crystallized glass. A diopside (CaO-MgO-2SiO<SB>2</SB>) phase or an anorthite (CaAl<SB>2</SB>Si<SB>2</SB>O<SB>8</SB>) phase exists in each layer 1a. Each surface ceramic layer 2 includes alumina and diopside-based crystallized glass, and the diopside phase and a rutile phase exist in each layer 2. <P>COPYRIGHT: (C)2008,JPO&INPIT |
