| 摘要 |
PROBLEM TO BE SOLVED: To precisely inspect the state of the adhesive or oil repellent film applied to the surface of an inspection target even if the matrix of the inspection target comprises a metal or resin having gloss in a case that the visible emission of the adhesive or oil repellent film irradiated with ultraviolet rays from a light source is detected by a CCD camera to inspect the coating state of the adhesive or the oil repellent film on the inspection target. SOLUTION: A first filter 7, which permits ultraviolet rays to transmit but cuts off visible light, is attached to the light source 2 and a second filter 8, which cuts off ultraviolet rays but permits visible light to transmit, is attached to the camera 4. Herein, from a viewpoint of more enhancing inspection precision, the camera 4 is arranged at a position separated in an almost vertical direction with respect to the surface to be inspected of the inspection target 1 and a dichroic mirror 3a, which permits visible light to transmit and reflects ultraviolet rays, is arranged between the inspection target 1 and the camera 4 to make the irradiation direction of the inspection target 1 with ultraviolet rays and the optical axis of the camera 4 coaxial. COPYRIGHT: (C)2008,JPO&INPIT
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