| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a probe sheet capable of accurately arranging a needle tip at a prescribed position without having to perform any troublesome position adjusting work in the connecting work between each contact and a probe sheet body. SOLUTION: The method includes the probe sheet body having an electrically-conducting path and a plurality of contacts formed in such a way as to protrude from one surface of the probe sheet body and connected to the electrically-conducting path. The manufacturing method includes the formation of the plurality of contacts on a base by sequentially depositing metal materials for the plurality of contacts on the base in a direction from each needle tip to its base part through the use of a photolithography technique; the formation of the probe sheet body, which is to be combined at the base part of each contact held on the base, on the base; and the separation of the contacts from the base integrally with the probe sheet body. COPYRIGHT: (C)2008,JPO&INPIT
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