发明名称 HYBRID WAFERS
摘要 <p>A hybrid wafer comprises a single-crystal Si<SUB>x</SUB>Ge<SUB>1-x</SUB> layer (15), where 0 = x = 1, a high thermal conductivity layer (10), and between the single-crystal Si<SUB>x</SUB>Ge<SUB>1-x</SUB> layer (15) and the high thermal conductivity layer (10), an intermediate layer (21) having a thickness of between 1 nanometer and 1 micrometer and comprising at least one amorphous or polycrystalline Si<SUB>x</SUB>Ge<SUB>1-x</SUB> layer (21a), where 0 = x = 1.</p>
申请公布号 WO2007122507(A1) 申请公布日期 2007.11.01
申请号 WO2007IB01087 申请日期 2007.04.23
申请人 BERG, SOEREN;OLSSON, JOERGEN;VALLIN, OERJAN;SMITH, ULF 发明人 BERG, SOEREN;OLSSON, JOERGEN;VALLIN, OERJAN;SMITH, ULF
分类号 H01L21/84 主分类号 H01L21/84
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