SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD

摘要

A semiconductor manufacturing apparatus and a semiconductor manufacturing method are provided to accurately control a rotation of a susceptor by using a driver, which penetrates into a reaction chamber and is directly coupled with the susceptor. A boat(22) rotatably supports a susceptor and is introduced into the reaction chamber(24). A ring-type holder is mounted on the susceptor. A driving unit(26) rotates the susceptor by using one of respective rollers as a driving roller. A pair of heaters(80) are arranged at a rear surface of a semiconductor substrate. A thermal process is performed on the semiconductor substrate. A mounting unit(92) inserts the heater into the susceptor and moves a heating surface of the heater to the rear surface of the semiconductor substrate(100). A ventilating nozzle is formed to surround a lower region of the semiconductor substrate. A supply nozzle is formed to surround an upper portion of the semiconductor substrate. An elevator(90) inserts the ventilating nozzle into a space between holders, such that the lower portion of the semiconductor substrate is surrounded by the holder.