摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wavefront conversion device in which better wavefront conversion light can be obtained and to provide an optical device equipped with the wavefront conversion device. <P>SOLUTION: The wavefront conversion device 10 has MEMS elements 12 and a moving part 13. The MEMS elements 12 are arranged side by side with arrangement direction gaps 15 and have a plurality of movable mirrors 11 which give a wavefront conversion to incident light L1. The moving part 13 moves the MEMS elements 12 in the moving direction D1 including the arrangement direction of the plurality of movable mirrors 11. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |