| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a liquid injection head which minimizes a deterioration in a piezoelectric element. SOLUTION: The manufacturing method of the liquid injection head includes the step of forming a lower electrode layer on a substrate, the step of forming a piezoelectric layer on the lower electrode layer, the step of etching for etching the substrate up to the lower electrode layer from the opposite to a substrate's surface which has the piezoelectric layer in a region narrower and within the region covered by the piezoelectric layer and, the step of heat treatment for performing a heat treatment of the piezoelectric layer after the completion of the etching step, the step of forming a diaphragm layer using an ink-resistant film from a material having an ink-resistant property, also to serve as a diaphragm, on the substrate's surface etched during the etching step, and the step of forming an upper electrode layer on the piezoelectric layer. COPYRIGHT: (C)2008,JPO&INPIT
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