发明名称 |
PIEZOELECTRIC LAMINATE, MANUFACTURING METHOD OF SAME, SURFACE ACOUSTIC WAVE ELEMENT, THIN FILM PIEZOELECTRIC RESONATOR, AND PIEZOELECTRIC ACTUATOR |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric laminate including a potassium sodium niobate layer formed on a substrate. <P>SOLUTION: The piezoelectric laminate 100 comprises a substrate 1; a template layer 3a formed above the substrate 1; and a piezoelectric layer 3b consisted of potassium sodium niobate and formed above the template layer 3a. <P>COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2007287918(A) |
申请公布日期 |
2007.11.01 |
申请号 |
JP20060113493 |
申请日期 |
2006.04.17 |
申请人 |
SEIKO EPSON CORP |
发明人 |
UENO MAYUMI;KIJIMA TAKESHI |
分类号 |
H01L41/09;B41J2/045;B41J2/055;B41J2/135;B41J2/14;H01L41/187;H01L41/319;H01L41/39;H02N2/00;H03H3/02;H03H9/17;H03H9/25 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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