发明名称 PHOTOSENSITIVE POLYAMIDE ESTER COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive polyamide ester composition useful for the production of electric/electronic materials, having a wide film thickness region in which i-line exposure is possible, and capable of giving a high resolution polyimide pattern. <P>SOLUTION: The photosensitive polyamide ester composition comprises (A) 100 parts by mass of a polyamide ester comprising a repeating unit represented by formula (1), (B) 1-15 parts by mass of a photoinitiator, and (C) 30-600 parts by mass of a solvent. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007286154(A) 申请公布日期 2007.11.01
申请号 JP20060110584 申请日期 2006.04.13
申请人 ASAHI KASEI ELECTRONICS CO LTD 发明人 TAMURA NOBUSHI;MARUYAMA MASAYUKI
分类号 G03F7/027;C08G73/10;G03F7/004;H01L21/027 主分类号 G03F7/027
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