| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared microscope capable of implementing mapping measurement in which a focus is satisfactorily adjusted at respective points in a sample measurement area. SOLUTION: The infrared microscope 10 is equipped with: a microscopic means 18 condensing light from the measurement area; a visible image detection means 24 acquiring the image of the measurement area; a stage 26 on which a sample is placed; a driving means 28 changing a distance between the microscopic means 18 and the stage 26; a focusing data acquiring means 34 changing a distance between the microscopic means 18 and the stage 26 by controlling the driving means 28 and acquiring the visible image of the measurement area at a plurality of different distances; and a focusing distance arithmetic calculation means 38 arithmetically calculating the focusing distances at respective measuring points from the information of the visible images acquired at the plurality of distances. The infrared microscope 10 implements the mapping measurement based on the focusing distances at the respective measuring points. COPYRIGHT: (C)2008,JPO&INPIT |
