| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer system which is capable of transferring small goods without making a small good transfer system waite between a large good transfer system and the small good transfer system. SOLUTION: The small good transfer system is equipped with a conveyer 4 which transfers reticle cassettes 18, and the reticle cassette 18 is lifted by the lifter 16 of a rail-guided truck 14 and handed over from the conveyer 4 into a dummy FOUP 22. Therefore, an FOUP transfer system and a reticle transfer system can be connected to each other. COPYRIGHT: (C)2008,JPO&INPIT
|
