| 摘要 |
PROBLEM TO BE SOLVED: To provide a long-term stable high-temperature pressure sensor that can prevent a problem from occurring in positioning a piezoelectric element, and allows a sensor signal to keep high linearity also under large temperature load. SOLUTION: This piezoelectric pressure sensor 1 has the piezoelectric element 3 in a housing 2. The piezoelectric element 3 is preloaded by a pre-loading means 8 between a diaphragms 4 located on the pressure side of the housing 2 and a base section 5 of the housing. The pre-loading means 8 extends along a sensor longitudinal axis 1', and the piezoelectric element 3 is arranged outside the pre-loading means 8. COPYRIGHT: (C)2008,JPO&INPIT
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